through

射频电阻RF resistance，微波电阻Microwave resistors，负载电阻Load resisto，衰减片Attenuator，馈通滤波器Feed through filter，穿心电容Feedthrough capacitors，滤波连接器Filter Connectors。

1．电器传动系统采用PLC可编程控制器及高分辨率伺服电机；机械传动采用直线轴承滑块、直线轴及滚珠丝杆副，结构简洁，运动精度高。

the electric transmission is through PLC controller and high resolution servo motor; the mechanical transmission is through linear bearing sliding block, shaft and ball screw pair, its structure is compact and movement accuracy is high

2．花篮就位检测，排片滞留报警；可防止碎片和放发生故障。

basket fixture positioning check and tiering chip error alarm, which prevent fragments from causing fault

3．快换花篮治具，适应随时更换产品；水床滑台、水流助推提高排片可靠性。

fast changing basket fixture, it’s suitable to change chips; water-bed sliding table is reliable by water flow boosting

4. 产品执行标准：符合国家相关工业技术标准。

the machine implement criterion which comply with related industry technology criterion.